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1

SPIE Proceedings [SPIE Optical Systems Design - Glasgow, Scotland, United Kingdom (Monday 1 September 2008)] Optical Fabrication, Testing, and Metrology III - Optical glasses and optical elements: comparison of specification standards ISO DIS 12123 and ISO 10110

Hartmann, Peter, Jedamzik, Ralf, Duparré, Angela, Geyl, Roland

Year:

2008

Language:

english

File:

PDF, 376 KB

english, 2008

2

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components - Shack-Hartmann wavefront sensor precision and accuracy

Neal, Daniel R., Copland, James, Neal, David A., Duparr, Angela, Singh, Bhanwar

Year:

2002

Language:

english

File:

PDF, 137 KB

english, 2002

3

SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V - Replication and subdivision of chromium nano-grating in atom lithography

Duparré, Angela, Geyl, Roland, Deng, Xiao, Chen, Jie, Liu, Jie, Ma, Yan, Cheng, Xinbin, Li, Tongbao

Year:

2015

Language:

english

File:

PDF, 626 KB

english, 2015

4

Atomic force microscopy on cross-sections of optical coatings: a new method

Angela Duparré, Carsten Ruppe, Kaj A. Pischow, Miklós Adamik, P.B. Barna

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 715 KB

english, 1995

5

Roughness evolution and scatter losses of multilayers for 193 nm optics

Schröder, Sven, Duparré, Angela, Tünnermann, Andreas

Journal:

Year:

2008

Language:

english

File:

PDF, 1.93 MB

english, 2008

6

Angle-resolved scattering: an effective method for characterizing thin-film coatings

Duparré, Angela, Schröder, Sven, Herffurth, Tobias, Blaschke, Holger

Journal:

Year:

2011

Language:

english

File:

PDF, 642 KB

english, 2011

7

Modeling of light scattering in different regimes of surface roughness

Schröder, Sven, Duparré, Angela, Coriand, Luisa, Tünnermann, Andreas, Penalver, Dayana H., Harvey, James E.

Journal:

Year:

2011

Language:

english

File:

PDF, 1.10 MB

english, 2011

8

In situ and ex situ characterization of optical surfaces by light scattering techniques

Trost, Marcus, Herffurth, Tobias, Schröder, Sven, Duparré, Angela, Beier, Matthias, Risse, Stefan, Tünnermann, Andreas, Böwering, Norbert

Journal:

Optical Engineering

Year:

2014

Language:

english

File:

PDF, 3.32 MB

english, 2014

9

SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Optical Fabrication, Testing, and Metrology II - Self-organized antireflective nanostructures on PMMA by ion etching

Kaless, A., Schulz, U., Kaiser, N., Duparré, Angela, Geyl, Roland, Wang, Lingli

Year:

2005

Language:

english

File:

PDF, 834 KB

english, 2005

10

[OSA Optical Fabrication and Testing - Kohala Coast, Hawaii (2014..-..)] Classical Optics 2014 - Light Scattering of Optical Components for Space Applications

Schröder, Sven, Katsir, Dina, Zeitner, Uwe, Duparré, Angela

Year:

2014

Language:

english

File:

PDF, 300 KB

english, 2014

11

Spectral angle resolved scattering of thin film coatings

Schröder, Sven, Unglaub, David, Trost, Marcus, Cheng, Xinbin, Zhang, Jinlong, Duparré, Angela

Journal:

Year:

2014

Language:

english

File:

PDF, 830 KB

english, 2014

12

Standardization of light scattering measurements

Schröder, Sven, von Finck, Alexander, Duparré, Angela

Journal:

Advanced Optical Technologies

Year:

2015

Language:

english

File:

PDF, 1.78 MB

english, 2015

13

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries - Ellipsometry: a sophisticated tool for optical metrology

Azzam, Rasheed M. A., Al-Jumaily, Ghanim A., Duparre, Angela, Singh, Bhanwar

Year:

2000

Language:

english

File:

PDF, 958 KB

english, 2000

14

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries - Numerical investigation of the resolution in solid immersion lens systems

Bischoff, Joerg, Brunner, Robert, Al-Jumaily, Ghanim A., Duparre, Angela, Singh, Bhanwar

Year:

2000

Language:

english

File:

PDF, 947 KB

english, 2000

15

Surface Characterization Techniques for Determining the Root-Mean-Square Roughness and Power Spectral Densities of Optical Components

Duparré, Angela, Ferre-Borrull, Josep, Gliech, Stefan, Notni, Gunther, Steinert, Jörg, Bennett, Jean M.

Journal:

Year:

2002

Language:

english

File:

PDF, 4.22 MB

english, 2002

16

Definition of roughness structures for superhydrophobic and hydrophilic optical coatings on glass

Coriand, Luisa, Mitterhuber, Monika, Duparré, Angela, Tünnermann, Andreas

Journal:

Year:

2011

Language:

english

File:

PDF, 942 KB

english, 2011

17

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Optical Manufacturing and Testing X - Angle and wavelength resolved light scattering measurement of optical surfaces and thin films

Schröder, Sven, Unglaub, David, von Finck, Alexander, Hauptvogel, Matthias, Trost, Marcus, Herffurth, Tobias, Duparré, Angela, Stover, John C., Fähnle, Oliver W., Williamson, Ray, Kim, Dae Wook

Year:

2013

Language:

english

File:

PDF, 1.59 MB

english, 2013

18

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Optical Manufacturing and Testing X - Estimating hemispherical scatter from incident plane measurements of isotropic samples scattering from both bulk and surface irregularities

Stover, John C., Schroeder, Sven, von Finck, Alexander, Unglaub, David, Duparré, Angela, Fähnle, Oliver W., Williamson, Ray, Kim, Dae Wook

Year:

2013

Language:

english

File:

PDF, 1.80 MB

english, 2013

19

Evaluation of subsurface damage by light scattering techniques

Trost, Marcus, Herffurth, Tobias, Schmitz, David, Schröder, Sven, Duparré, Angela, Tünnermann, Andreas

Journal:

Year:

2013

Language:

english

File:

PDF, 1.12 MB

english, 2013

20

Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor

Herffurth, Tobias, Schröder, Sven, Trost, Marcus, Duparré, Angela, Tünnermann, Andreas

Journal:

Year:

2013

Language:

english

File:

PDF, 1.28 MB

english, 2013

21

Laser damage studies on MgF[sub 2] thin films

Protopapa, Maria Lucia, De Tomasi, Ferdinando, Perrone, Maria Rita, Piegari, Angela, Masetti, Enrico, Ristau, Detlev, Quesnel, Etienne, Duparré, Angela

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2001

Language:

english

File:

PDF, 1.09 MB

english, 2001

22

SPIE Proceedings [SPIE SPIE Optical Systems Design - Marseille, France (Monday 5 September 2011)] Optical Fabrication, Testing, and Metrology IV - Roughness characterization of large EUV mirror optics by laser light scattering

Trost, Marcus, Schröder, Sven, Feigl, Torsten, Duparré, Angela, Tünnermann, Andreas, Duparré, Angela, Geyl, Roland

Year:

2011

Language:

english

File:

PDF, 893 KB

english, 2011

23

Generic detrending of surface profiles

Duparre, Angela

Journal:

Optical Engineering

Year:

1994

Language:

english

File:

PDF, 527 KB

english, 1994

24

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Reflection, Scattering, and Diffraction from Surfaces III - Sophisticated light scattering techniques from the VUV to the IR regions

Schröder, Sven, Trost, Marcus, Herffurth, Tobias, von Finck, Alexander, Duparré, Angela, Hanssen, Leonard M.

Year:

2012

Language:

english

File:

PDF, 692 KB

english, 2012

25

Origins of light scattering from thin film coatings

Schröder, Sven, Trost, Marcus, Garrick, Méabh, Duparré, Angela, Cheng, Xinbin, Zhang, Jinlong, Wang, Zhanshan

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 1.32 MB

english, 2015

26

Light scattering of interference coatings from the IR to the EUV spectral regions

Schröder, Sven, Trost, Marcus, Herffurth, Tobias, von Finck, Alexander, Duparré, Angela

Journal:

Advanced Optical Technologies

Year:

2014

Language:

english

File:

PDF, 1.33 MB

english, 2014

27

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, CA (Sunday 31 July 2005)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II - Vibration measurement of MEMS by digital laser microinterferometer

Liu, Sheng, Thomas, Dan, Samala, Praveen R., Yang, Lian X., Duparr½Á, Angela, Singh, Bhanwar, Gu, Zu-Han

Year:

2005

Language:

english

File:

PDF, 792 KB

english, 2005

28

Bewertung von Nanorauheiten durch Streulichtmessung (Nano-roughness Assessment by Light Scattering Measurement)

Schröder, Sven, Duparré, Angela, Tünnermann, Andreas

Journal:

tm - Technisches Messen

Year:

2006

Language:

german

File:

PDF, 494 KB

german, 2006

29

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 27 February 2011)] Extreme Ultraviolet (EUV) Lithography II - Efficient specification and characterization of surface roughness for extreme ultraviolet optics

Schröder, Sven, Trost, Marcus, Feigl, Torsten, Harvey, James E., Duparré, Angela, La Fontaine, Bruno M., Naulleau, Patrick P.

Year:

2011

Language:

english

File:

PDF, 2.75 MB

english, 2011

30

SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Optical Fabrication, Testing, and Metrology II - Sensitive and flexible light scatter techniques from the VUV to IR regions

Schröder, Sven, Gliech, Stefan, Duparré, Angela, Duparré, Angela, Geyl, Roland, Wang, Lingli

Year:

2005

Language:

english

File:

PDF, 1.00 MB

english, 2005

31

SPIE Proceedings [SPIE SPIE Optical Systems Design - Marseille, France (Monday 5 September 2011)] Optical Fabrication, Testing, and Metrology IV - Fabrication and testing of highly efficient resonance domain diffractive optical elements

Barlev, Omri, Golub, Michael A., Friesem, Asher A., Mahalu, Diana, Nathan, Menachem, Duparré, Angela, Geyl, Roland

Year:

2011

Language:

english

File:

PDF, 636 KB

english, 2011

32

[OSA Optical Fabrication and Testing - Rochester, NY (2008..-..)] Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing - Characterization of Surface and Thin-Film Roughness Using PSD Functions

Duparré, Angela

Year:

2008

Language:

english

File:

PDF, 265 KB

english, 2008

33

Characterization of optical coatings using a multisource table-top scatterometer

von Finck, Alexander, Herffurth, Tobias, Schröder, Sven, Duparré, Angela, Sinzinger, Stefan

Journal:

Year:

2014

Language:

english

File:

PDF, 1.30 MB

english, 2014

34

SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V - Fabrication and testing of STREEGO: a compact optical payload for earth observation on small satellites

Duparré, Angela, Geyl, Roland, Rossi, Massimiliano, Ferrario, Ivan, Ghislanzoni, Riccardo, Holbrouck, Piet, Ritucci, Antonio, Taccola, Matteo, Terraneo, Marco, Zocchi, Fabio E.

Year:

2015

File:

PDF, 1010 KB

2015

35

[OSA Optical Interference Coatings - Tucson, Arizona (2004..-..)] Optical Interference Coatings - High-sensitivity light scattering measurement of optical coating components

Gliech, Stefan, Schröder, Sven, Duparré, Angela

Year:

2004

Language:

english

File:

PDF, 222 KB

english, 2004

36

SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V - Enhancement of RIE: etched Diffractive Optical Elements surfaces by using Ion Beam Etching

Duparré, Angela, Geyl, Roland, Schmitt, J., Bischoff, Ch., Rädel, U., Grau, M., Wallrabe, U., Völklein, F.

Year:

2015

Language:

english

File:

PDF, 402 KB

english, 2015

37

[OSA Optical Fabrication and Testing - Monterey, California (2012..-..)] Imaging and Applied Optics Technical Papers - Light scattering-based measurement of relevant surface roughness

Schröder, Sven, Trost, Marcus, Coriand, Luisa, Duparré, Angela

Year:

2012

Language:

english

File:

PDF, 116 KB

english, 2012

38

SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V - Possibilities and limitations of imaging spectroscopic reflectometry in optical characterization of thin films

Duparré, Angela, Geyl, Roland, Ohlídal, Miloslav, Ohlidal, Ivan, Nečas, David, Vodák, Jiří, Franta, Daniel, Nádaský, Pavel, Vižd'a, František

Year:

2015

Language:

english

File:

PDF, 734 KB

english, 2015

39

SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V - V-block refractometer for monitoring the production of optical glasses

Duparré, Angela, Geyl, Roland, Petzold, Uwe, Jedamzik, Ralf, Hartmann, Peter, Reichel, Steffen

Year:

2015

Language:

english

File:

PDF, 756 KB

english, 2015

40

SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V - Measuring and quantifying scatter from a variety of sample types

Duparré, Angela, Geyl, Roland, Stover, John C.

Year:

2015

Language:

english

File:

PDF, 265 KB

english, 2015

41

SPIE Proceedings [SPIE SPIE Optical Systems Design - Jena, Germany (Monday 7 September 2015)] Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V - Fabrication and testing of STREEGO: a compact optical payload for earth observation on small satellites

Duparré, Angela, Geyl, Roland, Rossi, Massimiliano, Ferrario, Ivan, Ghislanzoni, Riccardo, Holbrouck, Piet, Ritucci, Antonio, Taccola, Matteo, Terraneo, Marco, Zocchi, Fabio E.

Year:

2015

Language:

english

File:

PDF, 1010 KB

english, 2015

42

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III - Interferometry for wafer dimensional metrology

Freischlad, Klaus, Tang, Shouhong, Grenfell, Jim, Duparré, Angela, Singh, Bhanwar, Gu, Zu-Han

Year:

2007

Language:

english

File:

PDF, 861 KB

english, 2007

43

SPIE Proceedings [SPIE SPIE/COS Photonics Asia - Beijing, China (Thursday 9 October 2014)] Optical Design and Testing VI - Light scattering characterization of optical components: BRDF, BTDF, and scatter losses

Wang, Yongtian, Du, Chunlei, Sasián, José, Tatsuno, Kimio, Schröder, Sven, von Finck, Alexander, Katsir, Dina, Zeitner, Uwe, Duparré, Angela

Year:

2014

Language:

english

File:

PDF, 581 KB

english, 2014

44

SPIE Proceedings [SPIE Optical Systems Design - Glasgow, Scotland, United Kingdom (Monday 1 September 2008)] Optical Fabrication, Testing, and Metrology III - Polishing and testing of the 3.5 m SiC M1 mirror of the Herschel space observatory of ESA

Korhonen, Tapio, Keinanen, Perttu, Pasanen, Mikko, Sillanpaa, Aimo, Duparré, Angela, Geyl, Roland

Year:

2008

Language:

english

File:

PDF, 1.03 MB

english, 2008

45

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, CA (Sunday 31 July 2005)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II - Lifetime estimation of InGaAlP lasers under different operating conditions

Li, Yajun, Duparr½Á, Angela, Singh, Bhanwar, Gu, Zu-Han

Year:

2005

Language:

english

File:

PDF, 1.23 MB

english, 2005

46

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II - Interferometric metrology of wafer nanotopography for advanced CMOS process integration

Valley, John F., Koliopoulos, Chris L., Tang, Shouhong, Duparre, Angela, Singh, Bhanwar

Year:

2001

Language:

english

File:

PDF, 698 KB

english, 2001

47

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components - Novel scheme for the ultraprecise and fast measurement of the nanotopography of large wafers

Weingaertner, Ingolf, Wurm, Matthias, Geckeler, Ralf D., Elster, Clemens, Schulz, Michael, Dumitrescu, Eugen, Krey, Stefan, Heinisch, Josef, Duparr, Angela, Singh, Bhanwar

Year:

2002

Language:

english

File:

PDF, 310 KB

english, 2002

48

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies - One way to accomplish the advanced requests of nanometrology: the nanometer coordinate measuring machine (NCMM)

Petersen, Ralph, Rothe, Hendrik, Duparre, Angela, Singh, Bhanwar

Year:

2003

Language:

english

File:

PDF, 1.24 MB

english, 2003

49

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components - Surface damage metrology: precision at low cost

Baker, Lionel R., Duparr, Angela, Singh, Bhanwar

Year:

2002

Language:

english

File:

PDF, 563 KB

english, 2002

50

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 22 February 1998)] Optical Microlithography XI - Surface finish and optical quality of CaF2 for UV lithography applications

Duparre, Angela, Thielsch, Roland, Kaiser, Norbert, Jakobs, Stefan, Mann, Klaus R., Eva, Eric, Van den Hove, Luc

Year:

1998

Language:

english

File:

PDF, 1.19 MB

english, 1998